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The Effect of Synthesis and Heat Treatment Modes on the Local Structure of a Ge2Sb2Te5 Chalcogenide Semiconductor
Features of amorphous state‒crystal phase transitions have been studied by X-ray diffractometry and Raman spectroscopy in their dependence on methods for obtaining Ge 20 Sb 20.5 Te 51 chalcogenide semiconductor samples and their heat treatment, as well as changes in their structure and short-range a...
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Published in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2022-03, Vol.56 (3), p.175-179 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Features of amorphous state‒crystal phase transitions have been studied by X-ray diffractometry and Raman spectroscopy in their dependence on methods for obtaining Ge
20
Sb
20.5
Te
51
chalcogenide semiconductor samples and their heat treatment, as well as changes in their structure and short-range atomic order. It is shown that the Ge
20
Sb
20.5
Te
51
films synthesized by thermal evaporation on an unheated substrate are amorphous, while after heat treatment at 220 and 400°C they transform into the crystalline phase with a cubic and hexagonal structure. The chemical bonds and basic structural elements that form the matrix of the investigated objects have been established and the changes occurring in them during heat treatment have been found. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782622020063 |