The Properties of Zr, Ti, Al and Si Nitride-Based Multilayer Coatings Obtained By Cathodic Arc Plasma Deposition

The paper investigates the cathodic arc plasma deposition of multilayer ZrTiN and ZrTiAlSiN coatings with the maximum hardness of 28 and 29 GPa, respectively. When the rotation velocity is reduced from 3 to 1 rpm, the coating hardness grows by 30% for ZrTiN and 50% for ZrTiAlSiN coatings. The additi...

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Bibliographic Details
Published in:Russian physics journal 2022-04, Vol.64 (12), p.2219-2224
Main Authors: Savostikov, V. M., Denisova, Yu. A., Denisov, V. V., Leonov, А. A., Ovchinnikov, S. V., Savchuk, M. V.
Format: Article
Language:English
Subjects:
Aluminum
Arc deposition
Cathodic coating (process)
Chemical properties
Coatings
Condensed Matter Physics
Hadrons
Hardness
Heavy Ions
Lasers
Mathematical and Computational Physics
Mechanical properties
Multilayers
Nitrides
Nuclear Physics
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Plasma deposition
Silicon
Theoretical
Thermal resistance
Zirconium
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Summary:The paper investigates the cathodic arc plasma deposition of multilayer ZrTiN and ZrTiAlSiN coatings with the maximum hardness of 28 and 29 GPa, respectively. When the rotation velocity is reduced from 3 to 1 rpm, the coating hardness grows by 30% for ZrTiN and 50% for ZrTiAlSiN coatings. The addition of Al and Si to the coating composition leads to a nanostructurization of the multilayer ZrTiAlSiN coatings and improves their heat resistance.
ISSN:1064-8887
1573-9228
DOI:10.1007/s11182-022-02580-x