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Large-Aperture STEM Hexapole Cs-Corrector

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Bibliographic Details
Published in:Microscopy and microanalysis 2022-08, Vol.28 (S1), p.2630-2632
Main Authors: Uhlemann, S., Riedel, T., Hartel, P., Perl, S., Linck, M., Gerheim, V., Müller, H.
Format: Article
Language:English
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927622009989