Optimization of gold germanium (Au0.17Ge0.83) thin films for high sensitivity resistance thermometry

Gold–germanium (Au xGe 1 − x) solid solutions have been demonstrated as highly sensitive thin film thermometers for cryogenic applications. However, little is known regarding the performance of the films for thicknesses less than 100 nm. In response, we report on the resistivity and temperature coef...

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Bibliographic Details
Published in:Journal of applied physics 2022-08, Vol.132 (6)
Main Authors: Scott, Ethan A., Smyth, Christopher M., Singh, Manish K., Lu, Tzu-Ming, Sharma, Peter, Pete, Douglas, Watt, John, Thomas Harris, C.
Format: Article
Language:English
Subjects:
Annealing
Applied physics
Germanium
Gold
Optimization
Sensitivity
Solid solutions
Sputtered films
Thermometers
Thermometry
Thickness
Thin films
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Summary:Gold–germanium (Au xGe 1 − x) solid solutions have been demonstrated as highly sensitive thin film thermometers for cryogenic applications. However, little is known regarding the performance of the films for thicknesses less than 100 nm. In response, we report on the resistivity and temperature coefficient of resistance (TCR) for sputtered films with thicknesses ranging from 10 to 100 nm and annealed at temperatures from 22 to 200  °C. The analysis is focused upon composition x = 0.17, which demonstrates a strong temperature sensitivity over a broad range. The thinnest films are found to provide an enhancement in TCR, which approaches 20% K − 1 at 10 K. Furthermore, reduced anneal temperatures are required to crystallize the Ge matrix and achieve a maximum TCR for films of reduced thickness. These features favor the application of ultra-thin films as high-sensitivity, on-device thermometers in micro- and nanolectromechanical systems.
ISSN:0021-8979
1089-7550
DOI:10.1063/5.0099182