Morphology and structure of diamond-like carbon film induced by picosecond laser ablation

• Published in: Applied physics. A, Materials science & processing Materials science & processing, 2022-09, Vol.128 (9), Article 850
• Main Authors: Takabayashi, Keisuke, Takahashi, Takashi, Tsuchiya, Eibon, Mimura, Kazuki, Yamamoto, Yoshiyuki, Kobayashi, Yohei, Tomita, Takuro, Yamaguchi, Makoto
• Format: Article
• Language: eng ; jpn
• Subjects: Applied physics; Characterization and Evaluation of Materials; Clustering; COLA 2021/2022; Condensed Matter Physics; Craters; Crystal defects; Crystallization; Diamond films; Diamond-like carbon films; Fluence; Irradiation; Laser ablation; Machines; Manufacturing; Materials science; Morphology; Nanotechnology; Optical and Electronic Materials; Physics; Physics and Astronomy; Processes; Raman spectra; Raman spectroscopy; S.i. : Cola 2021/2022; Surfaces and Interfaces; Thin Films
• ISSN: 0947-8396; 1432-0630
• DOI: 10.1007/s00339-022-05980-5

Raman spectroscopy was performed to investigate the laser-induced microscopic structural changes in diamond-like carbon known as tetrahedral amorphous carbon. Coarse laser-induced periodic surface structures (LIPSSs) at the center of the crater and fine LIPSSs at the upper and lower peripheral regions of the ablated crater were formed via laser irradiation. An analysis of the Raman spectra via mapping measurements around the periphery of the crater demonstrated an increase in defect density occurred without morphological or structural changes. In irradiated areas with a higher local fluence, clustering and crystallization of sp 2 occurred. The relationship between the crystalline structural changes and the local fluence was discussed.