Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature

• Published in: International journal of advanced manufacturing technology 2022-09, Vol.122 (3-4), p.1233-1243
• Main Authors: Xu, Jiabin, Rao, Xiaoshuang, Xu, Xiaoyu, Wang, Kechong, Guo, Bao, Liu, Lifei, Li, Yingjie, Zhang, Feihu
• Format: Article
• Language: English
• Subjects: CAE) and Design; Ceramics; Cold; Computer-Aided Engineering (CAD; Engineering; Grinding wheels; Industrial and Production Engineering; Mathematical models; Mechanical Engineering; Media Management; Original Article; Oxidation; Oxygen; Plasma; Room temperature; Silicon carbide; Trouble shooting
• ISSN: 0268-3768; 1433-3015
• DOI: 10.1007/s00170-022-09554-w

RB-SiC ceramic is one of the most important and useful materials as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP) process via oxygen (O 2 ), which is based on the precision grinding process in surface technology to modify at room temperature for grinding with a combination of plasma oxidation surface modification, is proposed. To identify the performance of the proposed cold atmospheric plasma process via oxygen method on the surface modification of RB-SiC ceramic fabrication of the precision grinding process, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, surface-modified layer and mathematical model of the grinding trajectory via the point P(A i , A j ) model analysis were conducted to investigate the effect of the composite process on grinding force and the mechanism of surface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provide a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the experimental test design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of surface modified layer material removal during precision grinding were solved. Graphical abstract The single-precision grinding and composite process schematic diagram process of the grinding wheel: (a) Traditional precision grinding process; (b) Cold atmospheric plasma (CAP) via oxygen (O 2 ) based on the precision grinding process.