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Structure and Phase Composition Study of Heavy Doped with Carbon Thin Films of TiO2 : C Deposited by RF Magnetron Sputtering

The aim of the present research is to study some aspects of the carbon doping of TiO 2 thin films and the influence of low temperature thermal annealing on the phase precipitation in thin films. Тhin films of heavily doped with carbon TiO 2 (up to 3 at % C) were deposited on (15 × 25 × 1 mm) glass s...

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Published in:Russian journal of inorganic chemistry 2022-10, Vol.67 (10), p.1509-1520
Main Authors: Milenov, T., Terziyska, P., Avdeev, G., Karashanova, D., Georgieva, B., Avramova, I., Genkov, K., Valcheva, E.
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cited_by cdi_FETCH-LOGICAL-c246t-bbf9e88a84d7b7f2ba850b44018b56cef331e98cb1fd1286558def076482f4993
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container_issue 10
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container_title Russian journal of inorganic chemistry
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creator Milenov, T.
Terziyska, P.
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description The aim of the present research is to study some aspects of the carbon doping of TiO 2 thin films and the influence of low temperature thermal annealing on the phase precipitation in thin films. Тhin films of heavily doped with carbon TiO 2 (up to 3 at % C) were deposited on (15 × 25 × 1 mm) glass substrates by r.f. magnetron co-sputtering of TiO 2 target and carbon plates on its erosion zone in Ar + air (residual pressure of 0.5 and 0.6 Pa, respectively) atmosphere. Two different process’s parameters were varied in different experiments in order to change the carbon content: the total area of the carbon plates which was 30, 84, 132, 400 and 830 mm 2 ) and the radial distance between the center of the circle of the erosion zone with maximum rate of sputtering which was 2 and 4 cm. The as-deposited and annealed (air, 400°C, 1h) thin films with thickness of 110–150 nm were studied by ellipsometry, grazing incidence X-ray diffractometry (GIXRD), X-ray photoelectron spectroscopy, Raman spectroscopy, transmission and scanning electron microscopies. The GIXRD patterns reveal a mix of amorphous and nanocrystalline anatase and rutile TiO 2 phases for all thin films. The Raman study confirms this conclusion but the TEM and GIXRD studies show presence of non-stoichiometric nanocrystalline phase based on Ti 3 C 20 O 14 together with the other phases of TiO 2 -anatase, rutile and brookite. Similar charcterizations were carried out after annealing at 400°C in air for 60 min and the most prominent effects of thermal treatment are discussed .
doi_str_mv 10.1134/S0036023622100333
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J. Inorg. Chem</addtitle><description>The aim of the present research is to study some aspects of the carbon doping of TiO 2 thin films and the influence of low temperature thermal annealing on the phase precipitation in thin films. Тhin films of heavily doped with carbon TiO 2 (up to 3 at % C) were deposited on (15 × 25 × 1 mm) glass substrates by r.f. magnetron co-sputtering of TiO 2 target and carbon plates on its erosion zone in Ar + air (residual pressure of 0.5 and 0.6 Pa, respectively) atmosphere. Two different process’s parameters were varied in different experiments in order to change the carbon content: the total area of the carbon plates which was 30, 84, 132, 400 and 830 mm 2 ) and the radial distance between the center of the circle of the erosion zone with maximum rate of sputtering which was 2 and 4 cm. 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ispartof Russian journal of inorganic chemistry, 2022-10, Vol.67 (10), p.1509-1520
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1531-8613
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source Springer Nature
subjects Anatase
Annealing
Brookite
Carbon
Carbon content
Chemistry
Chemistry and Materials Science
Ellipsometry
Glass substrates
Heat treatment
Inorganic Chemistry
Low temperature
Magnetron sputtering
Nanocrystals
Phase composition
Photoelectrons
Plates
Process parameters
Raman spectroscopy
Rutile
Spectrum analysis
Synthesis and Properties of Inorganic Compounds
Thickness
Thin films
Titanium dioxide
X ray photoelectron spectroscopy
title Structure and Phase Composition Study of Heavy Doped with Carbon Thin Films of TiO2 : C Deposited by RF Magnetron Sputtering
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