Apparatus and its principle for thermal aberration compensation

Thermal aberrations caused by absorption of laser beams degrade the image quality of exposure tools during the working process. Many compensators, such as lens movement or lens deformation, are used to compensate for low-order thermal aberrations of optical systems. In this paper, an apparatus with...

Full description

Saved in:
Bibliographic Details
Published in:Applied optics (2004) 2022-10, Vol.61 (29), p.8624
Main Authors: Yu, Xinfeng, Yang, Huaijiang, Ni, Mingyang
Format: Article
Language:English
Subjects:
Aberration
Algorithms
Compensation
Compensators
Image degradation
Image quality
Laser beams
Lenses
Principles
Temperature profiles
Time lag
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Thermal aberrations caused by absorption of laser beams degrade the image quality of exposure tools during the working process. Many compensators, such as lens movement or lens deformation, are used to compensate for low-order thermal aberrations of optical systems. In this paper, an apparatus with higher-order aberration correction capability is presented. The main principle of the apparatus is to actively heat and cool the lens near the pupil to generate a desired temperature profile to compensate for thermal aberrations. We first introduce the basic concept of the apparatus. Then we establish an analytical model to describe the lens temperature of the apparatus based on its working principle and demonstrate its compensation capability. Finally, an algorithm for dynamic thermal aberrations compensation is proposed to overcome the time lag effects of a thermally controlled lens.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.464483