Characterization of optical planar waveguide formed by helium ion implantation in PTR glass

• Published in: Indian journal of physics 2022, Vol.96 (13), p.3961-3965
• Main Authors: Lin, Shuo-Qi, Shen, Li-Jie, Tang, Min, Zheng, Rui-Lin, Yue, Qing-Yang, Liu, Chun-Xiao
• Format: Article
• Language: English
• Subjects: Astrophysics and Astroparticles; Beams (radiation); Finite difference method; Fluence; Helium ions; Ion implantation; Mathematical analysis; Metallurgy; Original Paper; Physics; Physics and Astronomy; Planar waveguides; Refractivity; Reinforced reaction injection molding; Wave propagation
• ISSN: 0973-1458; 0974-9845
• DOI: 10.1007/s12648-022-02312-4

The planar waveguide has been fabricated in the PTR glass by the He + implantation with an energy of 0.4 MeV and a fluence of 6 × 10 16 ions·cm −2 . The SRIM 2013 was used to simulate the range of the He + ions into the PTR glass and the energy loss profile. The end surface appearance of the waveguide was observed with a metallurgical microscope. The effective refractive indices of the guided modes on the PTR glass waveguide were measured by the prism coupling method. The refractive index profiles of the PTR glass waveguide under different annealing conditions were reconstructed by using the reflectivity calculation method. The propagation characteristics of 0.6328-μm light in the as-implanted waveguide structure were calculated by the finite-difference beam propagation method. Our work provides useful reference value for forming compact integrated optical devices on the PTR glass waveguides.