Structure, composition and mechanical properties of reactively sputtered (TiVCrTaW)Nx high-entropy films

• Published in: Journal of alloys and compounds 2022-12, Vol.925, p.166620, Article 166620
• Main Authors: Tu, Yuchun, Liu, Xuan, Zhao, Jiaoling, Yuan, Yanyan, Cheng, Benyuan, Xie, Zhiyong, Ye, Junjian, Wang, Wei, Huang, Xiuguang, Fu, Sizu
• Format: Article
• Language: English
• Subjects: Alloying elements; Argon; Body centered cubic lattice; Composition; Entropy; Face centered cubic lattice; Gas flow; Grain refinement; Hard coating; Hardness; High entropy alloys; High-entropy film; Magnetic properties; Magnetron sputtering; Mechanical properties; Modulus of elasticity; Nitrides; Nitrogen; Preferred orientation; Pulse DC sputtering; Silicon wafers; Solid solutions; Solid-solution; Solution strengthening
• ISSN: 0925-8388; 1873-4669
• DOI: 10.1016/j.jallcom.2022.166620

Nitride and metallic films multi-element (TiVCrTaW)Nx high-entropy alloy were deposited on silicon wafers by pulse DC magnetron sputtering. The microstructure and mechanical properties of the films prepared with different nitrogen gas flow ratios were studied. The results show that the concentration of nitrogen approached the stoichiometric composition at nitrogen gas ratio RN ≥ 33.3 %. The alloy film deposited with pure argon atmosphere exhibited a BCC structure and a very smooth surface, while an FCC with (111) or (200) preferred orientation and granular surface morphologies was observed in those films prepared with introduction of nitrogen gas. The (TiVCrTaW)Nx films exhibited enhanced hardness upon the addition of nitrogen probably due to the solid-solution strengthening effect and grain refinement. The nitride film achieved the highest hardness and Young’s modulus of 38 GPa and 340 GPa, respectively. The results show that the deposition atmosphere plays a vital rule in the structure and the properties of the (TiVCrTaW)Nx high-entropy films. [Display omitted] •High entropy alloy and ceramic TiVCrTaW films were grown by pulse DC reactive sputtering.•The N2 fractions of 0, 16.6 %, 33.3%, and 50% were used to prepare the (TiVCrTaW)Nx thin films.•The phase structures of high-entropy films changed from a BCC to an FCC structure with the increase in nitrogen content.•The maximum values of hardness and modulus of the (TiVCrTaW)Nx films reached up 38 Gpa and 340 Gpa, respectively.