Effect of annealing on the structural and optical properties of Alsb thin films

• Main Authors: Ibraheim, Adil M., Maki, Sameer A.
• Format: Conference Proceeding
• Language: English
• Subjects: Absorption spectra; Annealing; Atomic force microscopy; Energy gap; Glass substrates; Grain size; High vacuum; Optical properties; Room temperature; Surface roughness; Thin films; Vacuum thermal evaporation; X-ray diffraction; Zincblende
• ISSN: 0094-243X; 1551-7616
• DOI: 10.1063/5.0122505

In this paper AlSb thin films prepared onto pre cleaned amorphous glass substrate with thickness (200±10 nm) at room temperature using thermal evaporation method under high vacuum ( 5×10−6 mbar ), the influence of annealing at different temperatures ( 373K, 473K and 573K ) in the structural and optical properties were studied, The structural properties of films were evaluated by X-Ray Diffraction technique (XRD) and atomic force microscopy (AFM), (UV-Vis ) spectra in ranges from 300 to 1000 nm was used to study the optical properties of the films . XRD results showed that all samples have the polycrystalline cubic structure agreement with a zinc blende phase, and the average grain size increases with increasing annealing temperature, According to the AFM analysis notice that the great average surface roughness (RMS) of AlSb thin film remark at 573K . From UV–vis absorption spectra notice that all samples have high absorption in visible region and the direct energy gap values increasing with increase annealing temperature.