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High-frequency characterization for SAW interdigital transducers

A new technique to accurately determine transmission line (TL) network parameters of surface acoustic wave (SAW) interdigital transducers (IDTs) is presented. Various test IDTs and radio frequency (RF) filters for experimental characterizations are designed and fabricated on a LiTaO 3 piezoelectric...

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Published in:Journal of the Korean Physical Society 2022-11, Vol.81 (10), p.954-964
Main Authors: Shin, Junggeun, Yoo, Hansoo, Seong, Minsang, Lee, Donghun, Eo, Yungseon
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Yoo, Hansoo
Seong, Minsang
Lee, Donghun
Eo, Yungseon
description A new technique to accurately determine transmission line (TL) network parameters of surface acoustic wave (SAW) interdigital transducers (IDTs) is presented. Various test IDTs and radio frequency (RF) filters for experimental characterizations are designed and fabricated on a LiTaO 3 piezoelectric material. S-parameters for test devices were measured in the broad frequency bands of 50 MHz to 6 GHz. Then decoupling the acoustic waves from electromagnetic waves with an electro-mechanical coupling coefficient ( k 2 ), accurate TL circuit model parameters for SAW devices are determined. The acoustic wave model parameters are determined in an iterative manner by combining the measured S-parameters with a physical model. We show that SAW-based RF filters that operate at the frequency higher than 1 GHz can be very accurately designed using the proposed technique.
doi_str_mv 10.1007/s40042-022-00613-9
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subjects Circuits
Coupling coefficients
Decoupling
Electromagnetic radiation
Interdigital transducers
Iterative methods
Mathematical and Computational Physics
Mathematical models
Original Paper - Condensed Matter
Parameters
Particle and Nuclear Physics
Physics
Physics and Astronomy
Piezoelectricity
Radio frequency
Surface acoustic wave devices
Theoretical
Transmission lines
title High-frequency characterization for SAW interdigital transducers
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