Structuring of thin films by ultrashort laser pulses

Modern life and global communication would not be possible without technologically tailored thin films; they are omnipresent in daily life applications. In most cases, the films are deposited entirely at the carrying substrates in a specific processing step of the device or sample. In some cases, ho...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2023, Vol.129 (1), Article 14
Main Authors: Bonse, Jörn, Krüger, Jörg
Format: Article
Language:English
Subjects:
50th Anniversary of Applied Physics
Applied physics
Characterization and Evaluation of Materials
Chemical effects
Condensed Matter Physics
Femtosecond pulsed lasers
Laser processing
Machines
Manufacturing
Materials science
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
S.I. : 50th Anniversary of Applied Physics
Substrates
Surfaces and Interfaces
Thin Films
Ultrashort pulsed lasers
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Summary:Modern life and global communication would not be possible without technologically tailored thin films; they are omnipresent in daily life applications. In most cases, the films are deposited entirely at the carrying substrates in a specific processing step of the device or sample. In some cases, however, removal or modification must be performed locally, i.e., site-controlled and material selective through an additional laser processing step. For that ultrashort laser pulses with durations in the femtosecond and picosecond range can provide unique advantages and capabilities in industrially scalable schemes. This article reviews the current state of the research and corresponding industrial transfer related to the structuring of thin films by ultrashort pulsed lasers. It focuses on the pertinent historic developments, reveals the relevant physical and chemical effects, explores the ultimate limits, and discusses selected industrial and scientific applications.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-022-06229-x