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Methods for Estimating Plasma Density in a Large-volume Hollow Anode
The results of investigation of a low-pressure glow discharge with a hollow cathode and a large-volume hollow anode in argon and nitrogen are presented. The data on plasma density and electron temperature are obtained. A model is proposed, which describes the mechanisms of plasma sustainment in a ho...
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Published in: | Russian physics journal 2022-11, Vol.65 (7), p.1186-1193 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The results of investigation of a low-pressure glow discharge with a hollow cathode and a large-volume hollow anode in argon and nitrogen are presented. The data on plasma density and electron temperature are obtained. A model is proposed, which describes the mechanisms of plasma sustainment in a hollow anode. The model includes the non-uniformity of plasma density distribution in the anode cavity. The estimations of the plasma parameters are made. The model is in a good agreement with the experimental data. |
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ISSN: | 1064-8887 1573-9228 |
DOI: | 10.1007/s11182-022-02749-4 |