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Methods for Estimating Plasma Density in a Large-volume Hollow Anode

The results of investigation of a low-pressure glow discharge with a hollow cathode and a large-volume hollow anode in argon and nitrogen are presented. The data on plasma density and electron temperature are obtained. A model is proposed, which describes the mechanisms of plasma sustainment in a ho...

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Bibliographic Details
Published in:Russian physics journal 2022-11, Vol.65 (7), p.1186-1193
Main Authors: Landl, N. V., Korolev, Y. D., Kozyrev, A. V., Lopatin, I. V.
Format: Article
Language:English
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Summary:The results of investigation of a low-pressure glow discharge with a hollow cathode and a large-volume hollow anode in argon and nitrogen are presented. The data on plasma density and electron temperature are obtained. A model is proposed, which describes the mechanisms of plasma sustainment in a hollow anode. The model includes the non-uniformity of plasma density distribution in the anode cavity. The estimations of the plasma parameters are made. The model is in a good agreement with the experimental data.
ISSN:1064-8887
1573-9228
DOI:10.1007/s11182-022-02749-4