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Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films
Ferroelectric (piezoelectric) Pb (Zr 0.52 Ti 0.48 ) O 3 (PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO 2 /Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase...
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Published in: | Applied physics. A, Materials science & processing Materials science & processing, 2023-02, Vol.129 (2), Article 113 |
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creator | Ramos-Cano, C. J. Miki-Yoshida, M. Herrera-Basurto, R. Mercader-Trejo, F. Fuentes-Cobas, L. Auciello, O. Hurtado-Macías, A. |
description | Ferroelectric (piezoelectric) Pb (Zr
0.52
Ti
0.48
) O
3
(PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO
2
/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being
Y
= 2.5 ± 0.7 GPa for the Pb (Zr
0.52
Ti
0.48
) O
3
film. The hardness (
H
= 7.5 ± 0.16 GPa), elastic modulus (
E
= 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb (Zr
0.52
Ti
0.48
) O
3
films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were
P
s
= 45 μC/cm
2
,
P
r
=30 μC/cm
2
,
E
c
= 22 kV/cm, and
d
33
= 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation. |
doi_str_mv | 10.1007/s00339-022-06374-3 |
format | article |
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0.52
Ti
0.48
) O
3
(PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO
2
/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being
Y
= 2.5 ± 0.7 GPa for the Pb (Zr
0.52
Ti
0.48
) O
3
film. The hardness (
H
= 7.5 ± 0.16 GPa), elastic modulus (
E
= 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb (Zr
0.52
Ti
0.48
) O
3
films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were
P
s
= 45 μC/cm
2
,
P
r
=30 μC/cm
2
,
E
c
= 22 kV/cm, and
d
33
= 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation.</description><identifier>ISSN: 0947-8396</identifier><identifier>EISSN: 1432-0630</identifier><identifier>DOI: 10.1007/s00339-022-06374-3</identifier><language>eng</language><publisher>Berlin/Heidelberg: Springer Berlin Heidelberg</publisher><subject>Applied physics ; Characterization and Evaluation of Materials ; Chemical synthesis ; Chemical vapor deposition ; Coercivity ; Condensed Matter Physics ; Domains ; Elastic deformation ; Elastic limit ; Electron diffraction ; Ferroelectricity ; Hysteresis loops ; Lead zirconate titanates ; Machines ; Manufacturing ; Materials science ; Modulus of elasticity ; Nanoindentation ; Nanotechnology ; Optical and Electronic Materials ; Orientation effects ; Perovskites ; Physics ; Physics and Astronomy ; Piezoelectricity ; Polarization ; Preferred orientation ; Processes ; Scratching ; Silicon dioxide ; Silicon substrates ; Surfaces and Interfaces ; Synchrotron radiation ; Synchrotrons ; Texture ; Thin Films ; Yield point</subject><ispartof>Applied physics. A, Materials science & processing, 2023-02, Vol.129 (2), Article 113</ispartof><rights>The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c319t-cd4294f6803ebab419453b6ddb33f8c084c6bcba7667287d08ba7c9317ba8a233</citedby><cites>FETCH-LOGICAL-c319t-cd4294f6803ebab419453b6ddb33f8c084c6bcba7667287d08ba7c9317ba8a233</cites><orcidid>0000-0002-0406-3776</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Ramos-Cano, C. J.</creatorcontrib><creatorcontrib>Miki-Yoshida, M.</creatorcontrib><creatorcontrib>Herrera-Basurto, R.</creatorcontrib><creatorcontrib>Mercader-Trejo, F.</creatorcontrib><creatorcontrib>Fuentes-Cobas, L.</creatorcontrib><creatorcontrib>Auciello, O.</creatorcontrib><creatorcontrib>Hurtado-Macías, A.</creatorcontrib><title>Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films</title><title>Applied physics. A, Materials science & processing</title><addtitle>Appl. Phys. A</addtitle><description>Ferroelectric (piezoelectric) Pb (Zr
0.52
Ti
0.48
) O
3
(PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO
2
/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being
Y
= 2.5 ± 0.7 GPa for the Pb (Zr
0.52
Ti
0.48
) O
3
film. The hardness (
H
= 7.5 ± 0.16 GPa), elastic modulus (
E
= 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb (Zr
0.52
Ti
0.48
) O
3
films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were
P
s
= 45 μC/cm
2
,
P
r
=30 μC/cm
2
,
E
c
= 22 kV/cm, and
d
33
= 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation.</description><subject>Applied physics</subject><subject>Characterization and Evaluation of Materials</subject><subject>Chemical synthesis</subject><subject>Chemical vapor deposition</subject><subject>Coercivity</subject><subject>Condensed Matter Physics</subject><subject>Domains</subject><subject>Elastic deformation</subject><subject>Elastic limit</subject><subject>Electron diffraction</subject><subject>Ferroelectricity</subject><subject>Hysteresis loops</subject><subject>Lead zirconate titanates</subject><subject>Machines</subject><subject>Manufacturing</subject><subject>Materials science</subject><subject>Modulus of elasticity</subject><subject>Nanoindentation</subject><subject>Nanotechnology</subject><subject>Optical and Electronic Materials</subject><subject>Orientation effects</subject><subject>Perovskites</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Piezoelectricity</subject><subject>Polarization</subject><subject>Preferred orientation</subject><subject>Processes</subject><subject>Scratching</subject><subject>Silicon dioxide</subject><subject>Silicon substrates</subject><subject>Surfaces and Interfaces</subject><subject>Synchrotron radiation</subject><subject>Synchrotrons</subject><subject>Texture</subject><subject>Thin Films</subject><subject>Yield point</subject><issn>0947-8396</issn><issn>1432-0630</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNp9kE1PAyEQhonRxFr9A55IvOhhLctQ2D2apn4kTfRQL14Iy7KWZrusQBPbXy_tmniTyzCTdx7Ig9B1Tu5zQsQkEAJQZoTSjHAQLIMTNMoZHFtyikakZCIroOTn6CKENUmHUTpCu3nTGB2xa3BcGey8NV1U0boO965V3u6HRnU1juY7br3tPnEadKpz2cboleqsVu0x0Fuzd6ZNPG817r3rjY_WhAP97WOJb6d0woo73Nh2Ey7RWaPaYK5-6xi9P86Xs-ds8fr0MntYZBryMma6ZrRkDS8ImEpVLC_ZFCpe1xVAU2hSMM0rXSnBuaCFqEmR7rqEXFSqUBRgjG4GbvrP19aEKNdu67v0pKSCTwFA8Dyl6JDS3oXgTSN7bzfK72RO5EGxHBTLpFgeFcsDGoal0B-0GP-H_mfrByIEf0w</recordid><startdate>20230201</startdate><enddate>20230201</enddate><creator>Ramos-Cano, C. J.</creator><creator>Miki-Yoshida, M.</creator><creator>Herrera-Basurto, R.</creator><creator>Mercader-Trejo, F.</creator><creator>Fuentes-Cobas, L.</creator><creator>Auciello, O.</creator><creator>Hurtado-Macías, A.</creator><general>Springer Berlin Heidelberg</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-0406-3776</orcidid></search><sort><creationdate>20230201</creationdate><title>Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films</title><author>Ramos-Cano, C. J. ; Miki-Yoshida, M. ; Herrera-Basurto, R. ; Mercader-Trejo, F. ; Fuentes-Cobas, L. ; Auciello, O. ; Hurtado-Macías, A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c319t-cd4294f6803ebab419453b6ddb33f8c084c6bcba7667287d08ba7c9317ba8a233</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Applied physics</topic><topic>Characterization and Evaluation of Materials</topic><topic>Chemical synthesis</topic><topic>Chemical vapor deposition</topic><topic>Coercivity</topic><topic>Condensed Matter Physics</topic><topic>Domains</topic><topic>Elastic deformation</topic><topic>Elastic limit</topic><topic>Electron diffraction</topic><topic>Ferroelectricity</topic><topic>Hysteresis loops</topic><topic>Lead zirconate titanates</topic><topic>Machines</topic><topic>Manufacturing</topic><topic>Materials science</topic><topic>Modulus of elasticity</topic><topic>Nanoindentation</topic><topic>Nanotechnology</topic><topic>Optical and Electronic Materials</topic><topic>Orientation effects</topic><topic>Perovskites</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Piezoelectricity</topic><topic>Polarization</topic><topic>Preferred orientation</topic><topic>Processes</topic><topic>Scratching</topic><topic>Silicon dioxide</topic><topic>Silicon substrates</topic><topic>Surfaces and Interfaces</topic><topic>Synchrotron radiation</topic><topic>Synchrotrons</topic><topic>Texture</topic><topic>Thin Films</topic><topic>Yield point</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ramos-Cano, C. J.</creatorcontrib><creatorcontrib>Miki-Yoshida, M.</creatorcontrib><creatorcontrib>Herrera-Basurto, R.</creatorcontrib><creatorcontrib>Mercader-Trejo, F.</creatorcontrib><creatorcontrib>Fuentes-Cobas, L.</creatorcontrib><creatorcontrib>Auciello, O.</creatorcontrib><creatorcontrib>Hurtado-Macías, A.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics. A, Materials science & processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ramos-Cano, C. J.</au><au>Miki-Yoshida, M.</au><au>Herrera-Basurto, R.</au><au>Mercader-Trejo, F.</au><au>Fuentes-Cobas, L.</au><au>Auciello, O.</au><au>Hurtado-Macías, A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films</atitle><jtitle>Applied physics. A, Materials science & processing</jtitle><stitle>Appl. Phys. A</stitle><date>2023-02-01</date><risdate>2023</risdate><volume>129</volume><issue>2</issue><artnum>113</artnum><issn>0947-8396</issn><eissn>1432-0630</eissn><abstract>Ferroelectric (piezoelectric) Pb (Zr
0.52
Ti
0.48
) O
3
(PZT) films were synthesized using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO
2
/Si substrates. The optimum deposition temperature was 350 °C, followed by annealing at 650 °C for 1 h. Tetragonal perovskite phase and preferred orientation {0 0 1} in the PZT films were determined by two-dimensional grazing incidence diffraction using synchrotron X-ray radiation and nano-beam electron diffraction (NBED). The PZT film grains’ texture, represented by inverse pole representation, correlates with (0 0 1) and (1 1 1) orientations with approximate XRD peak distribution width of Ω ≈ 35°. The elastic-to-plastic transition of the piezoelectric-based structural deformation of the PZT films is represented by the pop-in, which marks the limit in the elastic behavior at the yield stress for which the material starts exhibiting permanent deformation, with the yield point being
Y
= 2.5 ± 0.7 GPa for the Pb (Zr
0.52
Ti
0.48
) O
3
film. The hardness (
H
= 7.5 ± 0.16 GPa), elastic modulus (
E
= 126 ± 3 GPa), and scratching were evaluated at the nanoscale, using a nanoindentation technique. No delamination or cracks were observed near the residual scratching stage. The switching of piezoelectric domains and domain polarization process, as a function of films’ texture, in the representative Pb (Zr
0.52
Ti
0.48
) O
3
films, were studied using Piezoresponse Force Microscopy (PFM). The values of the saturation polarization, remnant polarization, coercive field, and piezoelectric constant were
P
s
= 45 μC/cm
2
,
P
r
=30 μC/cm
2
,
E
c
= 22 kV/cm, and
d
33
= 137 pm/V, respectively. The local piezoelectric hysteresis loops and film nanostructure correlate with the polarization orientation.</abstract><cop>Berlin/Heidelberg</cop><pub>Springer Berlin Heidelberg</pub><doi>10.1007/s00339-022-06374-3</doi><orcidid>https://orcid.org/0000-0002-0406-3776</orcidid></addata></record> |
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source | Springer Nature |
subjects | Applied physics Characterization and Evaluation of Materials Chemical synthesis Chemical vapor deposition Coercivity Condensed Matter Physics Domains Elastic deformation Elastic limit Electron diffraction Ferroelectricity Hysteresis loops Lead zirconate titanates Machines Manufacturing Materials science Modulus of elasticity Nanoindentation Nanotechnology Optical and Electronic Materials Orientation effects Perovskites Physics Physics and Astronomy Piezoelectricity Polarization Preferred orientation Processes Scratching Silicon dioxide Silicon substrates Surfaces and Interfaces Synchrotron radiation Synchrotrons Texture Thin Films Yield point |
title | Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films |
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