Temperature-induced inconsistency in the pressure sensitivity of polymer-diaphragm-based FP pressure sensors

Fiber optic Fabry-Perot Interferometer benefits many requirements in pressure sensing. The variation of pressure sensitivity of the polymer-diaphragm-based Fabry-Perot pressure sensor with temperature is studied by investigating the thermal effect of the cavity air and the diaphragm separately. FP c...

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Bibliographic Details
Published in:Optical materials express 2023-03, Vol.13 (3), p.687
Main Authors: Zhao, YanJin, Song, NingFang, Gao, Fuyu, Xu, XiaoBin, Gao, ZiHang
Format: Article
Language:English
Subjects:
Fabry-Perot interferometers
Fiber optics
Polymers
Pressure sensors
Sensitivity
Temperature effects
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Summary:Fiber optic Fabry-Perot Interferometer benefits many requirements in pressure sensing. The variation of pressure sensitivity of the polymer-diaphragm-based Fabry-Perot pressure sensor with temperature is studied by investigating the thermal effect of the cavity air and the diaphragm separately. FP cavity vacuum treatment and multi-curvature diaphragm simulation and experimental studies are conducted. Experimental results show that the sensor pressure sensitivity decreases with increasing temperature by 0.46nm/(kPa·°C). The diaphragm’s thermal effect is the leading cause of temperature-induced inconsistency in pressure sensitivity, accounting for 0.43nm/(kPa·°C).
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.473026