Study of structural and morphological properties of RF-sputtered SnO2 thin films and their effect on gas-sensing phenomenon

The present work focuses on understanding the impact of varying the thickness of SnO thin films on its gas-sensing response. Systematic studies were conducted by X-ray diffraction (XRD) and atomic force microscopy (AFM) on the structural and morphological properties of SnO thin films, which were the...

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Bibliographic Details
Published in:International journal on smart sensing and intelligent systems 2023-01, Vol.16 (1)
Main Authors: Arora, Ajay Kumar, Mahajan, Sandeep, Verma, Maya, Haridas, Divya
Format: Article
Language:English
Subjects:
Crystallites
Film thickness
gas sensor
Grain size
Liquefied petroleum gas
LPG
Morphology
SnO
structural and morphological properties
thin film
Thin films
Tin dioxide
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Summary:The present work focuses on understanding the impact of varying the thickness of SnO thin films on its gas-sensing response. Systematic studies were conducted by X-ray diffraction (XRD) and atomic force microscopy (AFM) on the structural and morphological properties of SnO thin films, which were thereafter correlated for a deeper understanding of the sensing phenomenon. The structural and morphological properties of SnO thin films were found to be highly dependent on the film thickness. The 90 nm SnO thin film exhibits the maximum sensing response to 200 ppm liquefied petroleum gas (LPG). A rough microstructure and the maximum surface-to-volume ratio of the 90 nm SnO thin film favors the gas-sensing response. It also possesses the smallest grain size, with the majority of crystallites oriented along the preferred (110) plane. The results suggest the possibility of utilizing the 90 nm SnO thin film as a base material, which can be further modified using a catalyst for the efficient detection of LPG gas in the future.
ISSN:1178-5608
DOI:10.2478/ijssis-2023-0003