Empirical Transfer Function Estimation with Differential Filtering and Its Application to Fine Positioning Control of Galvano Scanner

Fast and precise point-to-point (PTP) positioning control is a critical technology for improving the throughput and product quality of industrial machines. This study aims to investigate the frequency response function (FRF) estimation method with differential filtering (ETFE-Diff: empirical transfe...

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Bibliographic Details
Published in:IEEE transactions on industrial electronics (1982) 2023-10, Vol.70 (10), p.1-10
Main Authors: Maeda, Yoshihiro, Iwasaki, Makoto
Format: Article
Language:English
Subjects:
Compensation
Differential filtering
Discrete Fourier transforms
empirical transfer function estimation
Estimation
Filtering
Filtration
Frequency estimation
Frequency response
frequency response function
Frequency response functions
leakage error
local rational modeling
point-to-point positioning control
Scanners
Servomotors
Transfer functions
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Summary:Fast and precise point-to-point (PTP) positioning control is a critical technology for improving the throughput and product quality of industrial machines. This study aims to investigate the frequency response function (FRF) estimation method with differential filtering (ETFE-Diff: empirical transfer function estimation with differential filtering) that uses the input and output signals of PTP motion during processing operation and to apply ETFE-Diff to a feedforward (FF) compensation adjustment. In this study, the principle of ETFE-Diff for FRF estimation was clarified, compared to the existing FRF estimation methods, i.e., empirical transfer function estimation and local rational modeling. Moreover, the effectiveness of ETFE-Diff for FF compensation adjustment in improving positioning accuracy of a galvano scanner as an industrial servo system was experimentally demonstrated.
ISSN:0278-0046
1557-9948
DOI:10.1109/TIE.2022.3217616