Effect of Different Si Target Currents on Performance of Magnetron Sputtering Wear Resistant Coatings

In order to ameliorate the properties of the coating material on the surface of the key moving parts of artillery, the influence of different Si target currents on microstructure and mechanical performances of magnetron sputtering TiAlMoSiN coating was studied. The phase structure of the coating, mi...

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Bibliographic Details
Published in:Journal of physics. Conference series 2023-04, Vol.2460 (1), p.12118
Main Authors: Liu, D, Shen, YL, Wang, EL, Meng, C, Liu, J, Shen, QM
Format: Article
Language:English
Subjects:
Bonding strength
Coefficient of friction
Columnar structure
Hardness
Magnetic properties
Magnetron sputtering
Microstructure
Multilayers
Physics
Protective coatings
Silicon substrates
Solid phases
Surface properties
Wear rate
Wear resistance
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Summary:In order to ameliorate the properties of the coating material on the surface of the key moving parts of artillery, the influence of different Si target currents on microstructure and mechanical performances of magnetron sputtering TiAlMoSiN coating was studied. The phase structure of the coating, microstructure, coating adhesion, friction and wear properties were characterized, respectively. The deposited TiAlMoSiN coatings were mainly composed of TiN phase, Mo 2 N phase, amorphous Si 3 N 4 phase and amorphous AlN phase. A typical columnar nano-multilayer structure was formed on the TiAlMoSiN coating after magnetron sputtering process. When the Si target current reached 1.0A, the coating hardness was supreme, valued 32.6 GPa. Along with the addition of the Si target current, the hardness and the bonding strength between the coatings and 45 steel substrates declined. As the Si target current was 1.5 A, TiAlMoSiN coating has the lowest friction coefficient and wear rate. Moreover, it was found out the coating with Si target current at 1.0A had shown the optimal surface properties.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2460/1/012118