Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz

• Published in: Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2023-04, Vol.17 (2), p.363-367
• Main Authors: Privezentsev, V. V., Firsov, A. A., Kulikauskas, V. S., Zatekin, V. V., Tereshchenko, A. N.
• Format: Article
• Language: English
• Subjects: Annealing; Chemistry and Materials Science; Excitons; Materials Science; Nanoclusters; Photoluminescence; Quartz; Rutherford backscattering spectroscopy; Spectrum analysis; Surface layers; Surfaces and Interfaces; Thin Films; Zinc oxide; Zinc oxides; Zinc silicates
• ISSN: 1027-4510; 1819-7094
• DOI: 10.1134/S1027451023020143

We present the results of the synthesis of nanoclusters of metallic zinc and its oxide in crystalline quartz implanted with 64 Zn + ions with a dose of 5 × 10 16 cm –2 and energy of 40 keV and annealed in oxygen at 400–900°C. Scanning electron microscopy combined with energy-dispersive spectroscopy, Rutherford backscattering spectroscopy and photoluminescence are used for the study. After implantation, separate nanoclusters of metallic zinc with a size of less than 1 μm are detected on the surface and in the surface layer of quartz. During annealing, metallic zinc passes to the phases of its oxide ZnO and silicate Zn 2 SiO 4 . After annealing at 700°C (optimal for obtaining the ZnO phase), zinc-oxide nanoclusters smaller than 500 nm are formed in the quartz surface layer. The photoluminescence spectrum exhibits a doublet peak at a wavelength of 370 nm, which is due to exciton luminescence in zinc oxide. After annealing at 800°C, the ZnO phase degrades, and the zinc silicate Zn 2 SiO 4 phase is formed.