Design of On-Wafer Calibration Kit for Accurate Pyramid Probe Card Based Surface Acoustic Wave Filter Measurements

To be fully deployed in high-throughput acoustic filter testing environment, pyramid probe cards require accurate characterization and de-embedding techniques. This paper presents a systematic design procedure for an on-wafer Short-Open-Load-Thru (SOLT) calibration kit on lithium niobate substrates...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2023-01, Vol.72, p.1-1
Main Authors: Sahu, Abhishek, Fendrich, John, Aaen, Peter H.
Format: Article
Language:English
Subjects:
Acoustic measurements
Algorithms
Calibration
Cards
coplanar waveguide (CPW)
Electromagnetic wave filters
Fixtures
Lithium
lithium niobate
Lithium niobates
probe card
Probes
Propagation velocity
Self calibration
short-open-load-thru (SOLT)
Substrates
Surface acoustic waves
Testing
Transmission line measurements
Transmission lines
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Summary:To be fully deployed in high-throughput acoustic filter testing environment, pyramid probe cards require accurate characterization and de-embedding techniques. This paper presents a systematic design procedure for an on-wafer Short-Open-Load-Thru (SOLT) calibration kit on lithium niobate substrates for filter measurements using pyramid probe cards. First, the propagation velocity of the lithium niobate substrate is extracted from a transmission line measurement based characterization methodology. Next, the coefficient of the Thru standard is calculated using the propagation velocity. A Line-Reflect-Reflect-Match (LRRM) based self-calibration algorithm and the partially known standards can then be used to remove the errors associated with the pyramid probe card. The coefficients of the remaining standards of the on-wafer calibration kit are finally extracted employing the calibrated probe card. As the test fixture itself is utilized to characterize the on-wafer calibration kit, the need of additional fixtures and measurements is eliminated. The effectiveness of the on-wafer calibration is validated by performing repeatable measurements of state-of-the-art filters fabricated on lithium niobate substrate and comparing with other calibration approaches such as port extension and off-wafer calibration using impedance standard substrate (ISS). We demonstrate that the on-wafer calibration kit offers comparable performance in terms of in-band loss and out-of-band rejection.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2023.3292950