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Sputtering of CuPt Alloy

Experimental results on sputtering of polycrystalline CuPt alloy under bombardment with 20 and 80 keV Ar ions are reported. The sputtering yields of the alloy were measured using rather for back scattering spectrometry (RBS) of 2 MeV He ions. The sputtering yield of the alloy was found to be less th...

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Bibliographic Details
Published in:Moscow University physics bulletin 2023-04, Vol.78 (2), p.161-165
Main Authors: Chernysh, V. S., Minnebayev, D. K., Kireev, D. S.
Format: Article
Language:English
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Summary:Experimental results on sputtering of polycrystalline CuPt alloy under bombardment with 20 and 80 keV Ar ions are reported. The sputtering yields of the alloy were measured using rather for back scattering spectrometry (RBS) of 2 MeV He ions. The sputtering yield of the alloy was found to be less than the corresponding value for pure Cu target, but higher than the value for pure Pt. The results are discussed within the framework of modern visions on the effect of preferential sputtering of multicomponent materials.
ISSN:0027-1349
1934-8460
DOI:10.3103/S0027134923020030