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Sputtering of CuPt Alloy
Experimental results on sputtering of polycrystalline CuPt alloy under bombardment with 20 and 80 keV Ar ions are reported. The sputtering yields of the alloy were measured using rather for back scattering spectrometry (RBS) of 2 MeV He ions. The sputtering yield of the alloy was found to be less th...
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Published in: | Moscow University physics bulletin 2023-04, Vol.78 (2), p.161-165 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Experimental results on sputtering of polycrystalline CuPt alloy under bombardment with 20 and 80 keV Ar
ions are reported. The sputtering yields of the alloy were measured using rather for back scattering spectrometry (RBS) of 2 MeV He
ions. The sputtering yield of the alloy was found to be less than the corresponding value for pure Cu target, but higher than the value for pure Pt. The results are discussed within the framework of modern visions on the effect of preferential sputtering of multicomponent materials. |
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ISSN: | 0027-1349 1934-8460 |
DOI: | 10.3103/S0027134923020030 |