Planar On-Silicon Inductor Design for Electromagnetic Tracking

In this paper, a planar on-silicon inductor design for electromagnetic tracking is presented. The design process has been demonstrated for a planar sensing coil in a 65 nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V/T/H...

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Bibliographic Details
Published in:IEEE sensors journal 2023-09, Vol.23 (18), p.1-1
Main Authors: Sidun, Aleksandr, Srivastava, Manish, O'Donoghue, Kilian, Jaeger, Herman Alexander, Cavaliere, Marco, O'Hare, Daniel, Van den Bosch, Christian, Cantillon-Murphy, Padraig
Format: Article
Language:English
Subjects:
CMOS
electromagnetic sensing
EMT
Flux density
inductor
Magnetic flux
Multilayers
PCELL
Sensitivity
Silicon
SKILL programming language
Tracking
virtual bronchoscopy
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Summary:In this paper, a planar on-silicon inductor design for electromagnetic tracking is presented. The design process has been demonstrated for a planar sensing coil in a 65 nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202 μ V/T/Hz . The designed inductor satisfies system requirements for clinical use in electromagnetic tracking applications. The current design has been verified on the TSMC 65 nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198 μ V/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multi-layer planar inductor designs is also proposed.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2023.3296471