Experimental Determination of the Cathode Spot Motion Parameters during the Operation of a Vacuum-Arc Evaporator with an Arched Magnetic Field

The dependences of the cathode spot velocity and the spot track width on the magnetic field on the cathode surface are determined. The parameters for vacuum arc evaporator cathodes made of a D16, VT1-0, or Ti–Al alloy are determined. The possibility of the influence of the parameters of the cathode...

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Bibliographic Details
Published in:Russian metallurgy Metally 2023-06, Vol.2023 (6), p.767-772
Main Authors: Kirillov, D. V., Tumanov, N. A., Riazanov, V. A., Pridatkin, F. P., Shimlykh, P. A., Novikov, D. O.
Format: Article
Language:English
Subjects:
Aluminum base alloys
Cathodes
Chemistry and Materials Science
Evaporation
Evaporators
Magnetic fields
Materials Science
Metallic Materials
Metallurgical Equipment
Parameters
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Summary:The dependences of the cathode spot velocity and the spot track width on the magnetic field on the cathode surface are determined. The parameters for vacuum arc evaporator cathodes made of a D16, VT1-0, or Ti–Al alloy are determined. The possibility of the influence of the parameters of the cathode zone motion on the erosion of the cathode is shown. The results obtained can be used to analyze the cathode erosion profile in arc evaporators with an arched magnetic field.
ISSN:0036-0295
1555-6255
1531-8648
DOI:10.1134/S0036029523060204