Characterization of Thickness and Electrical Properties of Ni-Cr Thin Films via Terahertz Time-domain Spectroscopy

We utilized terahertz time-domain spectroscopy (THz-TDS) to measure the thickness and electrical properties of nickel-chromium (Ni-Cr) films. This technique not only aligns well with traditional methods, such as haze-meter and transmission-densitometer measurements, but it also reveals the electrica...

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Bibliographic Details
Published in:Current optics and photonics 2023-10, Vol.7 (5), p.569-573
Main Authors: Kim, Sunghun, Maeng, Inhee, Bark, Hyeon Sang, Byun, Jungsup, Na, Jae Hun, Kim, Seho, Yim, Myeong Suk, Cha, Byung-Youl, Ji, Youngbin, Oh, Seung Jae
Format: Article
Language:English
Subjects:
Chromium
Electrical properties
Nondestructive testing
Quality control
Thickness measurement
Thin films
Time domain analysis
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Summary:We utilized terahertz time-domain spectroscopy (THz-TDS) to measure the thickness and electrical properties of nickel-chromium (Ni-Cr) films. This technique not only aligns well with traditional methods, such as haze-meter and transmission-densitometer measurements, but it also reveals the electrical properties and thickness of films down to a few tens of nanometers. The complex conductivity of the Ni-Cr thin films was extracted using the Tinkham formula. The experimental values closely aligned with the Drude model, indicating the reliability of our Ni-Cr film's electrical and optical constants. The thickness of Ni-Cr was estimated using the complex conductivity. These findings emphasize the potential of THz-TDS in quality control of metallic nanofilms, pointing toward an efficient and nondestructive test (NDT) for such analyses.
ISSN:2508-7266
2508-7274
DOI:10.3807/COPP.2023.7.5.569