FERROMAGNETIC-ENHANCED LOW-PRESSURE INDUCTIVE DISCHARGE FOR PLASMA PROCESSING

The generation of a low-frequency low-pressure inductive discharge with ferromagnetic enhancement of the magnetic coupling between the coil and the plasma is investigated. The main features and advantages of this plasma generation method for surface processing technologies are considered. New experi...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied mechanics and technical physics 2023-10, Vol.64 (5), p.757-766
Main Authors: Isupov, M. V., Pinaev, V. A.
Format: Article
Language:English
Subjects:
Applications of Mathematics
Argon
Classical and Continuum Physics
Classical Mechanics
Discharge
Dynamic characteristics
Electric fields
Electron energy
Ferromagnetism
Fluid- and Aerodynamics
Low pressure
Mathematical Modeling and Industrial Mathematics
Mechanical Engineering
Physics
Physics and Astronomy
Plasma processing
Radial distribution
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The generation of a low-frequency low-pressure inductive discharge with ferromagnetic enhancement of the magnetic coupling between the coil and the plasma is investigated. The main features and advantages of this plasma generation method for surface processing technologies are considered. New experimental data on the electrophysical and dynamic characteristics of ferromagnetic-enhanced low-pressure inductive discharge in argon with the addition of oxygen are presented. It is shown that the radial distribution of plasma parameters in a gas-discharge chamber can be controlled using distributed discharge generation. Significant fluctuations in the electron temperature during the discharge electric field period are found, and the mechanism of their occurrence is analyzed.
ISSN:0021-8944
1573-8620
DOI:10.1134/S0021894423050036