Slider surface control for ultra-high density recording

• Published in: Microsystem technologies 2010, Vol.16 (1-2), p.301-307
• Main Authors: Tjiptoharsono, Febiana, Gonzaga, Leonard Verano, Zhang, Mingsheng, Hua, Wei, Liu, Bo
• Format: Article
• Language: English
• Subjects: Abrasives; Aluminum oxide; Applied sciences; Bearings, bushings, rolling bearings; Diamonds; Drives; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; High density; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Magnetic and optical mass memories; Magnetic recording; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Nanotechnology; Performance evaluation; Physics; Precision engineering, watch making; Process parameters; Storage and reproduction of information; Surface roughness; Technical Paper
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-009-0891-5

Ultra-high density magnetic recording requires very low head-media physical spacing of less than 5 nm. The surface morphologies of the slider’s air-bearing surface (ABS) and the magnetic media surface are key limiting parameters to achieve this spacing requirement and therefore need to be further improved. For slider’s ABS, further reduction in surface roughness means further optimization of the nanogrinding process. This paper presents an experimental study to reduce ABS roughness in the nanogrinding process with fine diamond abrasives that are 50 nm in size. Average roughness ( R a ) of approximately 0.2 and 0.3 nm was achieved for Al 2 O 3 and AlTiC portions of the ABS, respectively. Nanogrinding process parameters, such as load and speed did not affect the minimum ABS roughness significantly. However, the load applied affected the time required to attain the minimum roughness value.