Bio-mass sensor using an electrostatically actuated microcantilever in a vacuum microchannel

The present work focuses on the dynamic analysis of a bio-mass sensor. The main component of this microsystem is a cantilever beam placed in a vacuum microchannel with a proof mass attached to its end. The rigid mass is coupled to an electrode to capacitively drive the beam. The operating principle...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2010-10, Vol.16 (10), p.1749-1755
Main Authors: Aboelkassem, Yasser, Nayfeh, Ali H., Ghommem, Mehdi
Format: Article
Language:English
Subjects:
Biosensors
Boundary conditions
Cantilever beams
Electrodes
Electronics and Microelectronics
Electrons
Engineering
Frequency shift
Instrumentation
Mechanical Engineering
Microbeams
Microchannels
Microelectromechanical systems
Nanotechnology
Parameter sensitivity
Power supply
Resonance
Sensors
Technical Paper
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Summary:The present work focuses on the dynamic analysis of a bio-mass sensor. The main component of this microsystem is a cantilever beam placed in a vacuum microchannel with a proof mass attached to its end. The rigid mass is coupled to an electrode to capacitively drive the beam. The operating principle is based on detecting the shift in the resonance frequency of the microbeam to measure the mass of a cell deposited on the sensing tip. We show that the present system enables easy detection and measurement of the added mass. To gain insight into the microsystem sensitivity to variations in its parameters, such as the gap distance and tip mass, as well as the use of higher-order modes, we examine their effects on the variation of the resonance frequency shift with respect to the added mass.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-010-1087-8