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Terahertz superconducting kinetic inductance detectors demonstrating photon-noise-limited performance and intrinsic generation-recombination noise
The development of large-format detector arrays with background-limited performance is of particular interest at the terahertz (THz) band, which is a unique band in search of our cosmic origins. With high sensitivity and being more promising in the pixel number and multiplexing technology, supercond...
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Published in: | Science China. Physics, mechanics & astronomy mechanics & astronomy, 2022-03, Vol.65 (3), p.239511, Article 239511 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The development of large-format detector arrays with background-limited performance is of particular interest at the terahertz (THz) band, which is a unique band in search of our cosmic origins. With high sensitivity and being more promising in the pixel number and multiplexing technology, superconducting kinetic inductance detectors (KID) are emerging as a major choice of detectors of this type. Here we fabricate three-THz-band (0.35/0.85/1.4 THz) KIDs on a single chip from a 120-nm-thick aluminum (Al) superconducting film and measure photon-noise-limited performance and intrinsic generation-recombination noise at high (>1 pW) and low ( |
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ISSN: | 1674-7348 1869-1927 |
DOI: | 10.1007/s11433-021-1828-y |