Ablation morphology and characteristic analysis of anisotropic conductive film (ACF) using femtosecond lasers with NIR, Green, and DUV wavelengths for micro-LED display repair

Anisotropic conductive film (ACF) is an electrical and electronic material composed of conductive balls embedded in a polymer matrix. ACF plays a crucial role in connecting electrodes and chips in Micro-LEDs. It serves as the target material in the repair process, enhancing production yield. For the...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2024-02, Vol.130 (2), Article 140
Main Authors: Choi, Junha, Cho, Kwangwoo, Cho, Sung-Hak
Format: Article
Language:English
Subjects:
Ablation
Characterization and Evaluation of Materials
Condensed Matter Physics
Defects
Electronic materials
Lasers
Light emitting diodes
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
Wavelengths
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Summary:Anisotropic conductive film (ACF) is an electrical and electronic material composed of conductive balls embedded in a polymer matrix. ACF plays a crucial role in connecting electrodes and chips in Micro-LEDs. It serves as the target material in the repair process, enhancing production yield. For the application of ACF in the Micro-LED display repair process, flawless selective micro-ablation is essential. However, little research related to ACF micro-ablation has been conducted so far. In this study, we investigated a detailed analysis of the ablation area and defects in ACF by using femtosecond lasers with three different wavelengths: 1026 nm (NIR), 513 nm (Green), and 257 nm (DUV) for selective micro-ablation. By conducting a comparative analysis of these wavelengths, we determined that the optimal ablation results were achieved using a 257 nm wavelength femtosecond laser. These results exhibited no-defect, uniform, reproducible, and symmetrical ablation characteristic, making it suitable for the Micro-LED display repair process. This research is expected to establish the foundation for micro-ablation in all applications where ACF is employed.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-024-07287-z