Electron-Ion-Plasma Equipment for Modification of the Surface of Materials and Products

We consider some new and recently modernized vacuum ion-plasma electrophysical facilities used to create dense low-temperature plasma in considerable volumes (≥0.25 m 3 ), as well as a complex unit that includes beam and plasma modules for various processes of electron-ion-plasma modification of the...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2023-12, Vol.87 (Suppl 2), p.S294-S300
Main Authors: Koval, N. N., Akhmadeev, Yu. Kh, Denisov, V. V., Shugurov, V. V., Ostroverkhov, E. V.
Format: Article
Language:English
Subjects:
Hadrons
Heavy Ions
Low temperature
Modernization
Nuclear Physics
Physics
Physics and Astronomy
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Summary:We consider some new and recently modernized vacuum ion-plasma electrophysical facilities used to create dense low-temperature plasma in considerable volumes (≥0.25 m 3 ), as well as a complex unit that includes beam and plasma modules for various processes of electron-ion-plasma modification of the surface of materials and products to improve their functional properties. The paper also provides the examples of modification processes using the developed equipment, as well as the results on improving the properties of modified surfaces.
ISSN:1062-8738
1934-9432
DOI:10.1134/S1062873823704750