Obtaining ZnO-based Transparent Conductive Films with Improved Functional Properties

A comparative study of the growth process of transparent conductive films based on Ga-doped ZnO is carried out during the magnetron sputtering of a traditional ZnO:Ga ceramic target and ZnO:Ga–Zn composite targets with a Zn metal phase content of 10 to 30 wt %. The influence of the composition of co...

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Bibliographic Details
Published in:Nanobiotechnology Reports (Online) 2023-12, Vol.18 (6), p.865-871
Main Authors: Akhmedov, A. K., Asvarov, A. Sh, Muslimov, A. E., Kanevsky, V. M.
Format: Article
Language:English
Subjects:
Carrier density
Chemistry and Materials Science
Comparative studies
Composition
Current carriers
Electron mobility
Gallium
Hall effect
Industrial and Production Engineering
Machines
Magnetron sputtering
Manufacturing
Materials Science
Nanomaterials for Functional and Structural Purposes
Nanotechnology
Processes
Substrates
Zinc oxide
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Summary:A comparative study of the growth process of transparent conductive films based on Ga-doped ZnO is carried out during the magnetron sputtering of a traditional ZnO:Ga ceramic target and ZnO:Ga–Zn composite targets with a Zn metal phase content of 10 to 30 wt %. The influence of the composition of composite targets and substrate temperature on the functional characteristics and microstructure of transparent conductive films is studied. It is demonstrated that an increase in the zinc content in the composition of the composite target when the substrate is heated to 200°C and above helps to improve the structural perfection of ZnO:Ga films and reduce their resistivity due to an increase in the concentration of charge carriers against the background of a high value of Hall mobility. All ZnO:Ga films obtained by sputtering composite targets at a substrate temperature of 200°C and above demonstrate high optical transmittance in the visible region.
ISSN:2635-1676
1995-0780
2635-1684
1995-0799
DOI:10.1134/S2635167623600268