MEMS Switch Based on a Cantilever with Increased Contact Force

MEMS switches are of significant interest for promising radio-electronic systems, but have not yet found widespread use due to the low reliability of microcontacts. The switch develops a low contact force, which results in high and unstable contact resistance. The force is usually increased by using...

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Bibliographic Details
Published in:Russian microelectronics 2023-12, Vol.52 (6), p.475-482
Main Authors: Belozerov, I. A., Uvarov, I. V.
Format: Article
Language:English
Subjects:
Contact force
Contact resistance
Electrical Engineering
Electronic systems
Engineering
Microelectromechanical systems
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Summary:MEMS switches are of significant interest for promising radio-electronic systems, but have not yet found widespread use due to the low reliability of microcontacts. The switch develops a low contact force, which results in high and unstable contact resistance. The force is usually increased by using electrodes with complex shapes and large areas, but a simple and compact configuration is preferable. This study presents a switch based on a 50-µm-long cantilever. For the first time, a method for selecting the vertical dimensions of the product is described, increasing the contact force to values in excess of 100 μN, necessary for reliable operation of the contacts. Test samples are manufactured and tested, and the performance characteristics are compared with the calculation results.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739723700774