Fast Compositional Mapping of Solar Cell by Laser Spectroscopy Technique for Process Monitoring

The applicability of laser-induced breakdown spectroscopy (LIBS) for elemental mapping in atmospheric condition is demonstrated using a commercial Cu(In,Ga)Se2 solar cells module. The LIBS analysis was carried out using a Q-switched Nd:YAG laser (λ = 532 nm, τ = 5 ns, top-hat profile) and a CCD spec...

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Bibliographic Details
Published in:International journal of precision engineering and manufacturing-green technology 2019-04, Vol.6 (2), p.189-196
Main Authors: Lee, Seok-Hee, Choi, Jang-Hee, In, Jung-Hwan, Jeong, Sungho
Format: Article
Language:English
Subjects:
Ablation
Copper indium gallium selenides
Energy
Fluence
Gases
Glass substrates
Laser induced breakdown spectroscopy
Lasers
Mapping
Mass spectrometry
Mass spectroscopy
Neodymium lasers
Photovoltaic cells
Q switched lasers
Secondary ion mass spectrometry
Semiconductor lasers
Silicon wafers
Solar cells
Spatial discrimination
Spatial resolution
Spectroscopy
YAG lasers
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Description
Summary:The applicability of laser-induced breakdown spectroscopy (LIBS) for elemental mapping in atmospheric condition is demonstrated using a commercial Cu(In,Ga)Se2 solar cells module. The LIBS analysis was carried out using a Q-switched Nd:YAG laser (λ = 532 nm, τ = 5 ns, top-hat profile) and a CCD spectrometer. At the laser fluence of 22 J/cm2 with He as the buffer gas, a spatial resolution of 130 μm was achieved and the LIBS mapping of a 2.58 × 2.58 mm2 area was completed in 24 min. It is demonstrated that the detailed variation of elemental concentrations across the scribing pattern and over the buried pattern could be measured with LIBS. The comparison of measured LIBS profiles with those from secondary ion mass spectrometry agreed closely.
ISSN:2288-6206
2198-0810
DOI:10.1007/s40684-019-00083-8