Investigation of the Effect of Hydrogen Content on the Conductivity of Nanocrystalline Diamond Films

the results are presented for investigation of electrical conductivity of nano crystalline diamond (NCD) films with thickness of 0.5–0.6 microns grown on silicon Si(100) substrates by the CVD metho d using methane-hydrogen and methane-hydrogen-oxygen mixtures. By the metho d of heating in vacuum wit...

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Bibliographic Details
Published in:Technical physics letters 2023-12, Vol.49 (Suppl 4), p.S311-S314
Main Authors: Ivanov, O. A., Vikharev, A. L., Bogdanov, S. A., Ovechkin, N. M., Loginov, V. P., Yakovlev, Yu. A., Vul’, A. Ya
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Diamond films
Electrical resistivity
High temperature
Hydrogen
Methane
Physics
Physics and Astronomy
Silicon substrates
Thickness
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Summary:the results are presented for investigation of electrical conductivity of nano crystalline diamond (NCD) films with thickness of 0.5–0.6 microns grown on silicon Si(100) substrates by the CVD metho d using methane-hydrogen and methane-hydrogen-oxygen mixtures. By the metho d of heating in vacuum with using hydrogen analyzer AB-1, the concentration of hydrogen in the studied films was determined and the relationship between the content of hydrogen in the NCD film and its conductivity was estimated. It has been shown that high-temperature processing in vacuum at the temperature of 600°C leads to desorption of hydrogen from the films and to a significant increase in their resistance.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785023010169