Solubility of Magnesium in Silicon

The solubility of impurity magnesium, which was introduced by diffusion in the temperature range of 1100–1300°C in silicon, is studied by secondary-ion mass spectrometry. It is demonstrated that, with the electrically inactive impurity component taken into account, the maximum solubility of magnesiu...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2023-10, Vol.57 (10), p.465-468
Main Authors: Shuman, V. B., Lavrentiev, A. A., Yakovleva, A. A., Abrosimov, N. V., Lodygin, A. N., Portsel, L. M., Astrov, Yu. A.
Format: Article
Language:English
Subjects:
Diffusion coefficient
Impurities
Magnesium
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
Secondary ion mass spectrometry
Silicon
Solubility
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Summary:The solubility of impurity magnesium, which was introduced by diffusion in the temperature range of 1100–1300°C in silicon, is studied by secondary-ion mass spectrometry. It is demonstrated that, with the electrically inactive impurity component taken into account, the maximum solubility of magnesium in silicon is 1–2 orders of magnitude lower (and the diffusion coefficient is higher) than the values reported earlier.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782623070175