Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO3 Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications

In this work, tungsten oxide (WO 3 ) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeter...

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Bibliographic Details
Published in:Journal of electronic materials 2024-05, Vol.53 (5), p.2351-2366
Main Authors: Kumar, K. Naveen, Reddy, G. V. Ashok, Sattar, Sheik Abdul, Jafri, R. Imran, Premkumar, R., Muthukrishnan, M., Ahamed, A. Asrar, Meera, M. R., Prakash, Nunna Guru, Tighezza, Ammar M., Ko, Tae Jo
Format: Article
Language:English
Subjects:
Annealing
Characterization and Evaluation of Materials
Chemistry and Materials Science
Coloring
Electrochemical analysis
Electrochromism
Electrolytes
Electronics and Microelectronics
Flow velocity
Instrumentation
Magnetron sputtering
Materials Science
Optical and Electronic Materials
Original Research Article
Oxygen
Room temperature
Solid State Physics
Spectrum analysis
Structural analysis
Sulfuric acid
Thin films
Tungsten oxides
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Summary:In this work, tungsten oxide (WO 3 ) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO 3 films immersed in the two different electrolyte solutions (H 2 SO 4 and LiClO 4 with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H 2 SO 4 electrolyte of an annealed WO 3 thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm 2 /C, and the LiClO 4 electrolyte of an annealed WO 3 thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm 2 /C.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-024-11000-4