Calibration of a step height standard for dimensional metrology using phase-shift interferometry and Hamming window: band-pass filter

In this paper, asynchronous dual-wavelength phase-shift interferometry is used to calibrate a line structure of a step height of 400 mm nominally standard based on the ISO 5436 profile analysis. The Hamming window: band-pass filter is used to assign accurately the detected point edge from the inters...

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Bibliographic Details
Published in:Journal of optics (New Delhi) 2024-04, Vol.53 (2), p.1420-1428
Main Author: Ibrahim, Dahi Ghareab Abdelsalam
Format: Article
Language:English
Subjects:
Algorithms
Bandpass filters
Interferometry
Lasers
Optical Devices
Optics
Phase shift
Photonics
Physics
Physics and Astronomy
Research Article
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Summary:In this paper, asynchronous dual-wavelength phase-shift interferometry is used to calibrate a line structure of a step height of 400 mm nominally standard based on the ISO 5436 profile analysis. The Hamming window: band-pass filter is used to assign accurately the detected point edge from the intersection of the experimental line edge from its simulation. The shifted off-axis interferograms are captured and corrected from noise. The corrected interferograms are wrapped by using the four-frame algorithm. The extracted phases at each wavelength are subtracted and the obtained phase map is converted to a height map. Experimental results show that the detected point edge of the step height standard being measured is assigned at filter order N  = 901, cut-off frequency f 0  = 0.39, and frequency bandwidth f b  = 0.25.
ISSN:0972-8821
0974-6900
DOI:10.1007/s12596-023-01279-7