Micro-Pirani Pressure Sensor With Operation Range Beyond Atmospheric Pressure Based on Aligned Carbon Nanotube Films

In this work, we report a micro-Pirani vacuum sensor based on super-aligned carbon nanotube (CNT) films. The devices are batch fabricated on silicon wafers utilizing simple microfabrication process, demonstrating much higher capability of large-scale and efficient parallel manufacturing compared wit...

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Bibliographic Details
Published in:IEEE electron device letters 2024-05, Vol.45 (5), p.901-904
Main Authors: Wang, Yuwei, Liu, Chenxi, Qiu, Jun, He, Yidan, Li, Zhiwei, Liu, Peng, Wei, Xianlong
Format: Article
Language:English
Subjects:
Atmospheric pressure
Carbon nanotubes
Electrical resistance measurement
Physical properties
Pirani effect
Pressure measurement
pressure sensor
Pressure sensors
Resistance
Semiconductor device measurement
Silicon
Substrates
vacuum
Wires
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Summary:In this work, we report a micro-Pirani vacuum sensor based on super-aligned carbon nanotube (CNT) films. The devices are batch fabricated on silicon wafers utilizing simple microfabrication process, demonstrating much higher capability of large-scale and efficient parallel manufacturing compared with the previous reported CNT Pirani sensors. Additionally, owing to the nanoscale diameter and excellent electrical and physical properties of CNT films, the upper pressure operating range is pushed up to several atmospheres ( \approx 2.5\times 10^{5} Pa). And the devices exhibit good performance on reproducibility (standard deviation of < 0.32%) and relatively high accuracy (relative error of 0.39% at 2\times 10^{4} Pa). All these results demonstrate the feasibility of our device as pressure sensors in future.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2024.3381153