IR-Fourier Spectroscopy of Attenuated Total Internal Reflection of Polyimide Films on Single-Crystal Silicon Wafers

• Published in: Journal of applied spectroscopy 2024-05, Vol.91 (2), p.302-306
• Main Authors: Prosolovich, V. S., Brinkevich, D. I., Grinyuk, E. V., Brinkevich, S. D., Kolos, V. V., Zubova, O. A., Lastovskii, S. B.
• Format: Article
• Language: English
• Subjects: Analytical Chemistry; Aromatic compounds; Atomic/Molecular Structure and Spectra; Bonding; Covalent bonds; Infrared spectroscopy; Metastable state; Physics; Physics and Astronomy; Silicon; Silicon wafers; Single crystals; Spectrum analysis; Stretching; Wafers
• ISSN: 0021-9037; 1573-8647
• DOI: 10.1007/s10812-024-01721-z

Attenuated total internal reflection (ATR) spectra of polyimide PI-2610 films deposited on single-crystal silicon wafers by centrifugation were studied after irradiation with 5-MeV electrons in a linear accelerator at doses of 1∙10 14 –2∙10 15 cm –2 . The strongest bands in the spectrum of the PI-2610 polyimide films were attributed to vibrations of the imide ring C–N–C st (1349 cm –1 ) and aromatic ring (1517 cm –1 ), stretching vibrations of the imide ring C=O str (1700 cm –1 ) and CO–C st -group C–C bonds (1074 cm -1 ), and bending vibrations of C–H bonds with maxima at 734 and 828 cm –1 . The spectral shape and intensities of bands with maxima at 1700 and 1349 cm –1 due to C=O and C=N–C str vibrations were observed to change at an initial dose of 1∙10 14 cm –2 . It was assumed that this was due to relaxation of metastable states of these groups. The intensities of bands corresponding to asymmetric and symmetric stretching vibrations of C–H 2 bonds decreased at a dose of 2∙10 15 cm –2 . The intensities of ATR bands due to vibrations of C=O and C–N bonds and aromatic and imide rings practically did not change.