Analysis of amplitude and dissipation factor of AT-cut quartz crystal resonators over a wide temperature range

Quartz Crystal Resonators (QCR) are fundamental components of Quartz Crystal Microbalance with Dissipation Monitoring (QCM-D) sensors, which are highly sensitive to temperature. First, theoretical and finite element models of an AT-cut QCR considering temperature coupling are established. Subsequent...

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Bibliographic Details
Published in:Journal of physics. Conference series 2024-08, Vol.2825 (1), p.12017
Main Authors: Zhang, Duanqin, Dou, Linpeng, Liu, Jia, Nie, Jing
Format: Article
Language:English
Subjects:
Amplitudes
Dissipation factor
Finite element method
Quartz crystals
Resonators
Shape effects
Substrates
Thermal simulation
Thermal stress
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Summary:Quartz Crystal Resonators (QCR) are fundamental components of Quartz Crystal Microbalance with Dissipation Monitoring (QCM-D) sensors, which are highly sensitive to temperature. First, theoretical and finite element models of an AT-cut QCR considering temperature coupling are established. Subsequently, the effects of quartz substrate shape and thermal stress on the amplitude and dissipation factor of the resonator across a broad temperature range are analyzed by using the constructed finite element simulation model. The results indicate that the dissipation factor shows little correlation with the shape and thermal stresses across a broad range of temperature fluctuations. The amplitude decreases gradually as the temperature rises, and the circular substrate experiences a relatively smaller rate of change compared to the squared one. Additionally, thermal stresses contribute to reducing the resonator’s amplitude.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2825/1/012017