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Multi-Axis Resonant Filter Design using Frequency Response Data applied to Industrial Scan Stage

Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optim...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2024-08, Vol.29 (4), p.2867-2876
Main Authors: Mae, Masahiro, Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi
Format: Article
Language:English
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Summary:Disturbance rejection of the high-precision scan stages is important in industrial lithography equipment. The aim of this article is to develop an optimization method for designing multi-axis resonant filters, that enhance the disturbance rejection performance in scanning motion. The developed optimization method explicitly defines resonant filters in structured representation and formulates the data-driven convex optimization problem. The method enables the multi-axis resonant filter design with iterative convex optimization using the frequency response data of the six-degree-of-freedom experimental setup. Experimental results on the industrial large-scale high-precision scan stage demonstrate the performance improvement of the disturbance rejection in the scanning motion using the optimized resonant filters.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2024.3402555