Matching Parameters for Vapor Deposition Process of Parylene C

DSC and DTG curves of Parylene C were determined by 5K/min, 10K/min, 15K/min, and 20K/min heating rates. The optimal sublimation temperature, cleavage temperature, polymerization temperation and pressure were obtained via DSC/DTG curves, thermodynamic theory and quantum chemical theory. It was const...

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Bibliographic Details
Published in:Journal of physics. Conference series 2024-08, Vol.2821 (1), p.012003
Main Authors: Xiaogang, Tong, Qiangqiang, Liu, Xianguang, Zeng, Yuting, Chen
Format: Article
Language:English
Subjects:
Cleavage
Polymerization
Process parameters
Quantum chemistry
Sublimation
Vapor deposition
Online Access:Get full text
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Summary:DSC and DTG curves of Parylene C were determined by 5K/min, 10K/min, 15K/min, and 20K/min heating rates. The optimal sublimation temperature, cleavage temperature, polymerization temperation and pressure were obtained via DSC/DTG curves, thermodynamic theory and quantum chemical theory. It was constructed that are the dimer sublimation, cleavage and polymerization models. The process parameters were matched for Parylene C through the sublimation, cleavage and polymerization rate computing. Subsequently, the experiments were conducted to prove it. The result shows that the efficiency of film formation has significantly raised, such as the film formation rate increasing by 57%, and the film formation time was reduced by more than 50%; The film purity was lowerd accordingly, the film quantity was significantly raised.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2821/1/012003