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Top-Down Formation of Biocompatible SiC Nanotubes
It was found that the synthesis of silicon carbide epitaxial layers on silicon by coordinated substitution of atoms can be accompanied by the formation of silicon carbide nanotubes growing deep into silicon substrates. That is, for the first time discovered a new “top-down” mechanism for the formati...
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Published in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2024-03, Vol.58 (3), p.209-213 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | It was found that the synthesis of silicon carbide epitaxial layers on silicon by coordinated substitution of atoms can be accompanied by the formation of silicon carbide nanotubes growing deep into silicon substrates. That is, for the first time discovered a new “top-down” mechanism for the formation of silicon carbide nanotubes. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782624030035 |