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Retraction Note: Optimization of plasma etch rate of deposited thin films by adaptive neuro fuzzy inference system

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Bibliographic Details
Published in:International journal of advanced manufacturing technology 2024-10, Vol.134 (7-8), p.3989-3989
Main Author: Petrovic, Nikola
Format: Article
Language:English
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ISSN:0268-3768
1433-3015
DOI:10.1007/s00170-024-14355-4