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A bioinspired permeable junction approach for sustainable device microfabrication
Microfabrication, the process of fabricating small structures usually in micrometre scale, has wide practical applications but confronts sustainability challenges due to the substantial chemical and energy consumption during the patterning and transfer stages. Here we introduce a bioinspired permeab...
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Published in: | Nature sustainability 2024-09, Vol.7 (9), p.1190-1203 |
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Main Authors: | , , , , , , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Microfabrication, the process of fabricating small structures usually in micrometre scale, has wide practical applications but confronts sustainability challenges due to the substantial chemical and energy consumption during the patterning and transfer stages. Here we introduce a bioinspired permeable junction approach involving patterning on biopolymer matrices with a salt-assisted photochemical synthesis to advance sustainable microfabrication. This approach leverages an ‘actuator-inhibitor-neutralizer’ process for on-demand adhesion and delamination. Utilizing water as a green actuation agent, our method realizes instantaneous delamination ( |
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ISSN: | 2398-9629 2398-9629 |
DOI: | 10.1038/s41893-024-01389-5 |