Application of Transmission Electron Microscopy for the Study of a Functional Nanoelement

Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale...

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Bibliographic Details
Published in:Technical physics 2024-07, Vol.69 (7), p.2093-2097
Main Authors: Prikhodko, K. E., Dement’eva, M. M.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Free electrons
Ion beams
Physics
Physics and Astronomy
Transmission electron microscopy
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Summary:Using the focused ion beam probe method, cross-section sample of a single functional device of micron dimensions were cut out for STEM and TEM studies. The use of analytical methods of transmission electron microscopy made it possible to obtain accurate data on the geometric parameters of nanoscale functional devices, the phase and elemental composition of functional element material, as well as on the concentration of free electrons at the Fermi level in the nanoelement material.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784224070363