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Microstructural and properties investigations of tantalum-doped tungsten diboride ceramic coatings via HiPIMS and RF magnetron sputtering
In this work, tantalum-doped tungsten boride ceramic coatings were deposited from a single sputtering target with the radio frequency (RF) and high-power impulse magnetron sputtering (HiPIMS) methods. Two-inch torus targets were synthesised from pure elements with the spark plasma sintering (SPS) me...
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Published in: | Archives of Civil and Mechanical Engineering 2024-09, Vol.24 (4), p.239, Article 239 |
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creator | Psiuk, Rafał Chrzanowska-Giżyńska, Justyna Denis, Piotr Wyszkowska, Edyta Wiśniewska, Maria Lipińska, Marta Wojtiuk, Ewa Kurpaska, Łukasz Smolik, Jerzy Mościcki, Tomasz |
description | In this work, tantalum-doped tungsten boride ceramic coatings were deposited from a single sputtering target with the radio frequency (RF) and high-power impulse magnetron sputtering (HiPIMS) methods. Two-inch torus targets were synthesised from pure elements with the spark plasma sintering (SPS) method with a stoichiometric composition of W
1-x
Ta
x
B
2.5
(
x
= 0, 0.08, 0.16, 0.24). Films were deposited with RF and HiPIMS power suppliers at process temperatures from RT to 600 °C. The substrate heating and the energy of the ionised material impacting the substrate increase the surface diffusivity of adatoms and are crucial in the deposition process. The results of SEM and XRD investigations clearly show that the addition of tantalum also changes the microstructure of the deposited films. The coatings without tantalum possess a finer microstructure than those with 24% of tantalum. The structure of films is homogeneous along the film thickness and composed mainly of columns with a (0001) preferred orientation. Deposited coatings are composed mainly of P
6
/mmm
α
-WB
2
structures. The analysis of nanoindentation results allowed us to determine that ceramic coatings obtained with the HiPIMS method possess hardness above 41 GPa and a ratio of hardness to reduced Young modulus above 0.1. The thickness of HiPIMS-deposited films is relatively small: only around 60% of the RF magnetron sputtered coatings even when the average power input was two times higher. However, it has been shown that the RF coatings require heating the substrate above 400 °C to obtain a crystalline structure, while the HiPIMS method allows for a reduction of the substrate temperature to 300 °C. |
doi_str_mv | 10.1007/s43452-024-01050-0 |
format | article |
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1-x
Ta
x
B
2.5
(
x
= 0, 0.08, 0.16, 0.24). Films were deposited with RF and HiPIMS power suppliers at process temperatures from RT to 600 °C. The substrate heating and the energy of the ionised material impacting the substrate increase the surface diffusivity of adatoms and are crucial in the deposition process. The results of SEM and XRD investigations clearly show that the addition of tantalum also changes the microstructure of the deposited films. The coatings without tantalum possess a finer microstructure than those with 24% of tantalum. The structure of films is homogeneous along the film thickness and composed mainly of columns with a (0001) preferred orientation. Deposited coatings are composed mainly of P
6
/mmm
α
-WB
2
structures. The analysis of nanoindentation results allowed us to determine that ceramic coatings obtained with the HiPIMS method possess hardness above 41 GPa and a ratio of hardness to reduced Young modulus above 0.1. The thickness of HiPIMS-deposited films is relatively small: only around 60% of the RF magnetron sputtered coatings even when the average power input was two times higher. However, it has been shown that the RF coatings require heating the substrate above 400 °C to obtain a crystalline structure, while the HiPIMS method allows for a reduction of the substrate temperature to 300 °C.</description><identifier>ISSN: 2083-3318</identifier><identifier>ISSN: 1644-9665</identifier><identifier>EISSN: 2083-3318</identifier><identifier>DOI: 10.1007/s43452-024-01050-0</identifier><language>eng</language><publisher>London: Springer London</publisher><subject>Ceramic coatings ; Ceramics ; Civil Engineering ; Engineering ; Film thickness ; Grain size ; Hardness ; Heating ; Magnetic properties ; Magnetron sputtering ; Mechanical Engineering ; Mechanical properties ; Microstructure ; Modulus of elasticity ; Nanoindentation ; Original Article ; Oxidation ; Plasma sintering ; Power supply ; Preferred orientation ; Radio frequency ; Spark plasma sintering ; Sputtered coatings ; Structural Materials ; Substrates ; Tantalum ; Temperature ; Toruses ; Tungsten</subject><ispartof>Archives of Civil and Mechanical Engineering, 2024-09, Vol.24 (4), p.239, Article 239</ispartof><rights>The Author(s) 2024</rights><rights>The Author(s) 2024. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c200t-7fd8fc5f665cbee6fa9090dbade3d02b0b542a6cc2e3f73842c4c7231911f8b43</cites><orcidid>0000-0003-4275-0726</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27922,27923</link.rule.ids></links><search><creatorcontrib>Psiuk, Rafał</creatorcontrib><creatorcontrib>Chrzanowska-Giżyńska, Justyna</creatorcontrib><creatorcontrib>Denis, Piotr</creatorcontrib><creatorcontrib>Wyszkowska, Edyta</creatorcontrib><creatorcontrib>Wiśniewska, Maria</creatorcontrib><creatorcontrib>Lipińska, Marta</creatorcontrib><creatorcontrib>Wojtiuk, Ewa</creatorcontrib><creatorcontrib>Kurpaska, Łukasz</creatorcontrib><creatorcontrib>Smolik, Jerzy</creatorcontrib><creatorcontrib>Mościcki, Tomasz</creatorcontrib><title>Microstructural and properties investigations of tantalum-doped tungsten diboride ceramic coatings via HiPIMS and RF magnetron sputtering</title><title>Archives of Civil and Mechanical Engineering</title><addtitle>Arch. Civ. Mech. Eng</addtitle><description>In this work, tantalum-doped tungsten boride ceramic coatings were deposited from a single sputtering target with the radio frequency (RF) and high-power impulse magnetron sputtering (HiPIMS) methods. Two-inch torus targets were synthesised from pure elements with the spark plasma sintering (SPS) method with a stoichiometric composition of W
1-x
Ta
x
B
2.5
(
x
= 0, 0.08, 0.16, 0.24). Films were deposited with RF and HiPIMS power suppliers at process temperatures from RT to 600 °C. The substrate heating and the energy of the ionised material impacting the substrate increase the surface diffusivity of adatoms and are crucial in the deposition process. The results of SEM and XRD investigations clearly show that the addition of tantalum also changes the microstructure of the deposited films. The coatings without tantalum possess a finer microstructure than those with 24% of tantalum. The structure of films is homogeneous along the film thickness and composed mainly of columns with a (0001) preferred orientation. Deposited coatings are composed mainly of P
6
/mmm
α
-WB
2
structures. The analysis of nanoindentation results allowed us to determine that ceramic coatings obtained with the HiPIMS method possess hardness above 41 GPa and a ratio of hardness to reduced Young modulus above 0.1. The thickness of HiPIMS-deposited films is relatively small: only around 60% of the RF magnetron sputtered coatings even when the average power input was two times higher. However, it has been shown that the RF coatings require heating the substrate above 400 °C to obtain a crystalline structure, while the HiPIMS method allows for a reduction of the substrate temperature to 300 °C.</description><subject>Ceramic coatings</subject><subject>Ceramics</subject><subject>Civil Engineering</subject><subject>Engineering</subject><subject>Film thickness</subject><subject>Grain size</subject><subject>Hardness</subject><subject>Heating</subject><subject>Magnetic properties</subject><subject>Magnetron sputtering</subject><subject>Mechanical Engineering</subject><subject>Mechanical properties</subject><subject>Microstructure</subject><subject>Modulus of elasticity</subject><subject>Nanoindentation</subject><subject>Original Article</subject><subject>Oxidation</subject><subject>Plasma sintering</subject><subject>Power supply</subject><subject>Preferred orientation</subject><subject>Radio frequency</subject><subject>Spark plasma sintering</subject><subject>Sputtered coatings</subject><subject>Structural Materials</subject><subject>Substrates</subject><subject>Tantalum</subject><subject>Temperature</subject><subject>Toruses</subject><subject>Tungsten</subject><issn>2083-3318</issn><issn>1644-9665</issn><issn>2083-3318</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNp9kMtKAzEYhQdRsNS-gKuA69E_l7l0KcXaQoviZR0yuZSUNjMmmYKP4FubdgRduUog3znhfFl2jeEWA1R3gVFWkBwIywFDATmcZSMCNc0pxfX5n_tlNglhC5CwiuCyGGVfayt9G6LvZey92CHhFOp822kfrQ7IuoMO0W5EtK0LqDUoChfFrt_nKkEKxd5tQtQOKdu03iqNpPZibyWSbQqlR3SwAi3s83L9emp_maO92DgdfetQ6PoYtU_cVXZhxC7oyc85zt7nD2-zRb56elzO7le5JAAxr4yqjSxMWRay0bo0YgpTUI1QmiogDTQFI6KUkmhqKlozIpmsCMVTjE3dMDrObobetPKjT-P4tu29S19yijHUuKpZkSgyUEc7wWvDO2_3wn9yDPxonQ_WebLOT9Y5pBAdQqE7LtL-t_qf1Dej9YhO</recordid><startdate>20240928</startdate><enddate>20240928</enddate><creator>Psiuk, Rafał</creator><creator>Chrzanowska-Giżyńska, Justyna</creator><creator>Denis, Piotr</creator><creator>Wyszkowska, Edyta</creator><creator>Wiśniewska, Maria</creator><creator>Lipińska, Marta</creator><creator>Wojtiuk, Ewa</creator><creator>Kurpaska, Łukasz</creator><creator>Smolik, Jerzy</creator><creator>Mościcki, Tomasz</creator><general>Springer London</general><general>Springer Nature B.V</general><scope>C6C</scope><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0003-4275-0726</orcidid></search><sort><creationdate>20240928</creationdate><title>Microstructural and properties investigations of tantalum-doped tungsten diboride ceramic coatings via HiPIMS and RF magnetron sputtering</title><author>Psiuk, Rafał ; Chrzanowska-Giżyńska, Justyna ; Denis, Piotr ; Wyszkowska, Edyta ; Wiśniewska, Maria ; Lipińska, Marta ; Wojtiuk, Ewa ; Kurpaska, Łukasz ; Smolik, Jerzy ; Mościcki, Tomasz</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c200t-7fd8fc5f665cbee6fa9090dbade3d02b0b542a6cc2e3f73842c4c7231911f8b43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Ceramic coatings</topic><topic>Ceramics</topic><topic>Civil Engineering</topic><topic>Engineering</topic><topic>Film thickness</topic><topic>Grain size</topic><topic>Hardness</topic><topic>Heating</topic><topic>Magnetic properties</topic><topic>Magnetron sputtering</topic><topic>Mechanical Engineering</topic><topic>Mechanical properties</topic><topic>Microstructure</topic><topic>Modulus of elasticity</topic><topic>Nanoindentation</topic><topic>Original Article</topic><topic>Oxidation</topic><topic>Plasma sintering</topic><topic>Power supply</topic><topic>Preferred orientation</topic><topic>Radio frequency</topic><topic>Spark plasma sintering</topic><topic>Sputtered coatings</topic><topic>Structural Materials</topic><topic>Substrates</topic><topic>Tantalum</topic><topic>Temperature</topic><topic>Toruses</topic><topic>Tungsten</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Psiuk, Rafał</creatorcontrib><creatorcontrib>Chrzanowska-Giżyńska, Justyna</creatorcontrib><creatorcontrib>Denis, Piotr</creatorcontrib><creatorcontrib>Wyszkowska, Edyta</creatorcontrib><creatorcontrib>Wiśniewska, Maria</creatorcontrib><creatorcontrib>Lipińska, Marta</creatorcontrib><creatorcontrib>Wojtiuk, Ewa</creatorcontrib><creatorcontrib>Kurpaska, Łukasz</creatorcontrib><creatorcontrib>Smolik, Jerzy</creatorcontrib><creatorcontrib>Mościcki, Tomasz</creatorcontrib><collection>SpringerOpen</collection><collection>CrossRef</collection><jtitle>Archives of Civil and Mechanical Engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Psiuk, Rafał</au><au>Chrzanowska-Giżyńska, Justyna</au><au>Denis, Piotr</au><au>Wyszkowska, Edyta</au><au>Wiśniewska, Maria</au><au>Lipińska, Marta</au><au>Wojtiuk, Ewa</au><au>Kurpaska, Łukasz</au><au>Smolik, Jerzy</au><au>Mościcki, Tomasz</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Microstructural and properties investigations of tantalum-doped tungsten diboride ceramic coatings via HiPIMS and RF magnetron sputtering</atitle><jtitle>Archives of Civil and Mechanical Engineering</jtitle><stitle>Arch. Civ. Mech. Eng</stitle><date>2024-09-28</date><risdate>2024</risdate><volume>24</volume><issue>4</issue><spage>239</spage><pages>239-</pages><artnum>239</artnum><issn>2083-3318</issn><issn>1644-9665</issn><eissn>2083-3318</eissn><abstract>In this work, tantalum-doped tungsten boride ceramic coatings were deposited from a single sputtering target with the radio frequency (RF) and high-power impulse magnetron sputtering (HiPIMS) methods. Two-inch torus targets were synthesised from pure elements with the spark plasma sintering (SPS) method with a stoichiometric composition of W
1-x
Ta
x
B
2.5
(
x
= 0, 0.08, 0.16, 0.24). Films were deposited with RF and HiPIMS power suppliers at process temperatures from RT to 600 °C. The substrate heating and the energy of the ionised material impacting the substrate increase the surface diffusivity of adatoms and are crucial in the deposition process. The results of SEM and XRD investigations clearly show that the addition of tantalum also changes the microstructure of the deposited films. The coatings without tantalum possess a finer microstructure than those with 24% of tantalum. The structure of films is homogeneous along the film thickness and composed mainly of columns with a (0001) preferred orientation. Deposited coatings are composed mainly of P
6
/mmm
α
-WB
2
structures. The analysis of nanoindentation results allowed us to determine that ceramic coatings obtained with the HiPIMS method possess hardness above 41 GPa and a ratio of hardness to reduced Young modulus above 0.1. The thickness of HiPIMS-deposited films is relatively small: only around 60% of the RF magnetron sputtered coatings even when the average power input was two times higher. However, it has been shown that the RF coatings require heating the substrate above 400 °C to obtain a crystalline structure, while the HiPIMS method allows for a reduction of the substrate temperature to 300 °C.</abstract><cop>London</cop><pub>Springer London</pub><doi>10.1007/s43452-024-01050-0</doi><orcidid>https://orcid.org/0000-0003-4275-0726</orcidid><oa>free_for_read</oa></addata></record> |
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subjects | Ceramic coatings Ceramics Civil Engineering Engineering Film thickness Grain size Hardness Heating Magnetic properties Magnetron sputtering Mechanical Engineering Mechanical properties Microstructure Modulus of elasticity Nanoindentation Original Article Oxidation Plasma sintering Power supply Preferred orientation Radio frequency Spark plasma sintering Sputtered coatings Structural Materials Substrates Tantalum Temperature Toruses Tungsten |
title | Microstructural and properties investigations of tantalum-doped tungsten diboride ceramic coatings via HiPIMS and RF magnetron sputtering |
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