On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation

In this work, the relationship between nonlinear effects and the signal-to-noise ratio of a resonator is analyzed and the impact of reducing nonlinear effects of the resonator on the performance of a resonant accelerometer is investigated. A theoretical framework is formulated to evaluate the dynami...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2024-10, Vol.33 (5), p.568-576
Main Authors: Li, Chengxin, Quan, Aojie, Zhang, Hemin, Wang, Chen, Wang, Linlin, Mert Torunbalci, Mustafa, Wang, Yuan, Kraft, Michael
Format: Article
Language:English
Subjects:
Accelerometers
Clamping
Compensation
Dynamic range
Electrostatics
Impact analysis
Microelectromechanical systems
Noise
Noise levels
nonlinear effects
Nonlinearity
nonlinearity compensation
Performance evaluation
resonant accelerometer
Resonant frequency
Resonators
Signal to noise ratio
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Summary:In this work, the relationship between nonlinear effects and the signal-to-noise ratio of a resonator is analyzed and the impact of reducing nonlinear effects of the resonator on the performance of a resonant accelerometer is investigated. A theoretical framework is formulated to evaluate the dynamic range of the double clamped-clamped resonator. A reduction of the mechanical nonlinearity is achieved through an external electrostatic force, resulting in an enhancement of the dynamic range from 93.8 dB to 132.6 dB. Experimental findings indicate the nonlinear coefficient is reduced to 2.2% compared to an approach without nonlinearity compensation. The nonlinearity compensation demonstrates a 12.8 dB improvement in the signal-to-noise ratio of the resonator, leading to a 5.5-fold increase in resolution of the accelerometer and an extension of the dynamic range by 15 dB. The proposed technique enables the performance of resonant sensors to be further optimized. [2024-0107]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2024.3443641