Comparative analysis of microcantilever MEMS switch designs utilizing electrostatic actuation method

A comparative analysis was conducted on microcantilever RF MEMS switches to optimize their pull-in voltage using the electrostatic actuation method. The study considered two distinct types of microcantilever RF MEMS switches, namely the Π-microcantilever and R-microcantilever MEMS switches. These tw...

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Bibliographic Details
Main Authors: Saxena, Ankur, Agrawal, Vimal Kumar, Kumar, Mahesh, Singh, Kulwant
Format: Conference Proceeding
Language:English
Subjects:
Actuation
Deflection
Electric potential
Microelectromechanical systems
Switches
Thin films
Voltage
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Summary:A comparative analysis was conducted on microcantilever RF MEMS switches to optimize their pull-in voltage using the electrostatic actuation method. The study considered two distinct types of microcantilever RF MEMS switches, namely the Π-microcantilever and R-microcantilever MEMS switches. These two structures were optimized to achieve maximum deflection at the applied voltage threshold. The implementation of a thin film switch in the RF MEMS switch led to increased switching speed and reduced power consumption at lower pull-in voltages. Additionally, the RF MEMS switch was effective in minimizing fringing field effects and stress. Specifically, the R-microcantilever RF MEMS switch demonstrated a maximum deflection of 0.399 µm, while the Π-microcantilever switch exhibited a minimum deflection of 0.0119 µm at a pull-in voltage of 8.1.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0227596